发明名称 AUTOMATIC TREATMENT APPARATUS
摘要 PURPOSE:To obtain an apparatus wherein an operating error can be reduced irrespective of the mastery degree of an operator by installing the following: a display means which outputs display screens whose contents are different so as to correspond to a treatment state; a plurality of kinds of input switches, for operation use, which are installed so as to correspond to the individual display screens; and the like. CONSTITUTION:The title apparatus is provided with the following: a control file 2 which stores a control program used to control a device 1 to be controlled; an output device 4 which outputs the treatment state of the device 1 to be controlled; and an input device 4 which designates the treatment content of the device 1 to be controlled. The device 1 to be controlled is controlled by using a central processing unit 3 on the basis of the control program. The automatic treatment apparatus is provided with the following: a display means which outputs display screens whose contents are different so as to correspond to its treatment state; a plurality of kinds of input switches, for operation use, which are installed so as to correspond to the contents of said individual display screens: and a control means which changes over or changes one part or all of said input switches for operation use so as to correspond to the contents of the display screens which are output to the output device 4.
申请公布号 JPH0536579(A) 申请公布日期 1993.02.12
申请号 JP19910188468 申请日期 1991.07.29
申请人 HITACHI LTD 发明人 OKAMOTO YOSHIHIKO;SHIBATA YUKINOBU;TAKADA IKUO
分类号 G05B19/05;G05B19/048;H01L21/027 主分类号 G05B19/05
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