| 摘要 |
PURPOSE:To miniaturize a coupling line in a semiconductor integrated circuit and to facilitate circuit integration by forming strip central conductors while being overlapped with each other. CONSTITUTION:A ground conductor 1 is formed on the entire face of a substrate 6 made of a semiconductor and a dielectric film 4 is formed on the conductor 1 and a strip center conductor 2 is formed on a dielectric film 4. Furthermore, after a dielectric film 5 is formed on the dielectric film 4 and the center conductor 2, the strip center conductor 3 is formed on the dielectric film 5. Furthermore, the center conductor 2 is formed in a meandering shape while the center line is made equal each other. That is, the central conductors 2, 3 are formed overlappingly to form the microwave line respectively with respect to a ground conductor 1 to reduce the area occupied by the microwave coupling line and to miniaturize the size and to facilitate the circuit integration. |
