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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0536703(A)
申请公布日期
1993.02.12
申请号
JP19910188631
申请日期
1991.07.29
申请人
HITACHI LTD
发明人
WASHIO KATSUYOSHI;NAKAMURA TORU
分类号
H01L29/73;H01L21/331;H01L29/732;H01L29/737
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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