FORMATION OF OPTICAL REFLECTING MIRROR MOUNTED ON OPTICAL SURFACE

摘要

PURPOSE:To form an optical reflecting mirror with a satisfactory reflecting surface having high reflectance. CONSTITUTION:A groove 21 is formed in a substrate 11 with a formed optical waveguide 12 by machining and etching so that the groove 21 intersects the waveguide 12 and diagonally meets the surface 11a of the substrate 11. An optical reflecting mirror 22 with a smooth surface is formed at the boundary between the groove 21 and the waveguide 12.