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发明名称
摘要
申请公布号	JPH0511471(U)	申请公布日期	1993.02.12
申请号	JP19910065187U	申请日期	1991.07.23
申请人		发明人
分类号	G01K11/00;H01L23/473;H01S5/00;(IPC1-7):H01S3/18	主分类号	G01K11/00
代理机构		代理人
主权项
地址

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