SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PURPOSE:To realize a good and stable bonding operation by a method wherein a piezoelectric element is used as the quake-applying source of a capillary. CONSTITUTION:A piezoelectric element 2 which has been attached to a support 4 is attached to an arm 3 as the quake-applying source of a capillary 1. The displacement amount of the capillary 1 is controlled by using a signal generator for piezoelectricelement control use. Thereby, it is possible to arbitrarily set the number of vibrations and the waveform of its tip part.