TEMPERATURE CONTROL METHOD OF LOW TEMPERATURE PART IN SIMPLE CRYSTAL MANUFACTURE OF III-V COMPOUND SEMICONDUCTOR

摘要

In manufacturing a single crystal of GaAs by using a horizontal Bridgman method or a gradient freeze method, the method for controlling the temperature of the low temp. part (As distribution) (15) comprises directly sensing the temperature of the low temp. part (15) by mounting a thermocoupler (22) at the low temp. part (15) and controlling the temperature of the low temp. part (15) within the limits of 0.5 deg.C by using a thermocoupler (21).