DRUCKSENSOR.

摘要

A pressure sensor (10) includes a three part package including a main housing member (12) defining two spaced-apart chambers (20,22), a bottom closure member (18) providing the bottom wall of one of the chambers, and a top cover member (14) hermetically sealing the two chambers from one another and including a port (34) for admission of gases into one of the chambers. A pressure sensing element (32) is disposed in the chamber having the port and mounted on the bottom closure member, and a signal processing element (36) is mounted in the other chamber. Electrical connections between the two elements are by means of leads (47) which extend into each chamber and pass through an inner wall (30) separating the chambers. A low temperature differential between the two elements is provided by extending (47a) one of the leads from the one chamber to a position directly underlying and in intimate contact with the bottom surface of the signal processing element in the other chamber. Additionally, the bottom closure member is of a high thermal conductivity material and extends along the bottom of the main housing member to beneath the other chamber.