| 摘要 |
PURPOSE:To obtain a high S/N by providing an array of condensing lenses between a scintilator which converts X-rays into visible rays and an array of photodiodes for detecting the visible rays, and condensing the visible rays. CONSTITUTION:A Ti film is formed on one main face of a glass base 3 by sputtering method and used as a mask to form an array of micro lenses 2 having a refractive index distribution within the base 3. CsI heavily doped with T1 is deposited on the mask to form a scintilator 1. An array 6 of photodiodes for detecting visible rays converted by the scintilator 1 are formed. Incident X-rays 25 are converted into visible rays 26 by the scintilator 1 and condensed by the micro lenses 2 and incident on a photodiode 6' and thereby the rate of signal transmission from the photodiode 6' is increased and also the size of the photodiode 6' can be reduced and so dark currents are decreased and S/N is enhanced.
|
