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发明名称
PLASMA PROCESSING METHOD AND PRODUCTS THEREOF
摘要
申请公布号
US5185179(A)
申请公布日期
1993.02.09
申请号
US19890417311
申请日期
1989.10.05
申请人
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
发明人
YAMAZAKI, SHUNPEI;HAYASHI, SHIGENORI;ISHIDA, NORIYA;SASAKI, MARI;TAKEYAMA, JUNICHI;ITOU, KENJI;KOJIMA, MASAHIRO;KADONO, MASAYA
分类号
C23C16/26;C23C16/34
主分类号
C23C16/26
代理机构
代理人
主权项
地址
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