VACUUM ULTRAVIOLET LIGHT SOURCE,申请号US19910718978-传众专利搜索

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发明名称	VACUUM ULTRAVIOLET LIGHT SOURCE
摘要
申请公布号	US5185552(A)	申请公布日期	1993.02.09
申请号	US19910718978	申请日期	1991.06.21
申请人	KABUSHIKI KAISHA TOSHIBA	发明人	SUZUKI, SETSUO;NODA, ETSUO;MORIMIYA, OSAMI
分类号	H01J61/09;H01J61/92	主分类号	H01J61/09
代理机构		代理人
主权项
地址

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