发明名称 Method of forming an array of densely packed discrete metal microspheres
摘要 An array of densely packed discrete metal microspheres which may be deformable and electrically conductive may be formed on a substrate by a method including the steps of providing a substrate having a depositing surface in the chamber forming a metal vapor in the chamber and depositing the metal vapor on the depositing surface, the depositing surface having a temperature at or above the melting point of the metal.
申请公布号 US5185178(A) 申请公布日期 1993.02.09
申请号 US19910706793 申请日期 1991.05.29
申请人 MINNESOTA MINING AND MANUFACTURING COMPANY 发明人 KOSKENMAKI, DAVID C.
分类号 C23C14/18;C23C14/20 主分类号 C23C14/18
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