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发明名称
CRYSTAL GROWTH DEVICE AND METHOD FOR GROWING CRYSTAL USING THE SAME DEVICE
摘要
申请公布号
JPH0532479(A)
申请公布日期
1993.02.09
申请号
JP19910026163
申请日期
1991.02.20
申请人
SUMITOMO METAL IND LTD
发明人
FUJIWARA TOSHIYUKI;KOBAYASHI SUMIO;MIYAHARA SHUNJI;KUBO TAKAYUKI;FUJIWARA HIDEKI;INAMI SHUICHI
分类号
C30B15/14;H01L21/208
主分类号
C30B15/14
代理机构
代理人
主权项
地址
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