| 摘要 |
PURPOSE:To produce efficiently a high-hardness BN film on the surface of a base body by installing the base body in a reaction chamber, introducing a gas for forming BN into the chamber, generating plasma and projecting laser light thereby accelerating the bond between B and N. CONSTITUTION:An N-contg. gas such as N2 is introduced through the 1st introducing pipe 4 into the reaction chamber 1 in which a magnetic field is applied by a coil 2 for an electromagnet. A microwave is introduced at the same instant through a waveguide 3 into the chamber to generate the plasma. A voltage is impressed to the plasma by an ion accelerating electrode 13 consisting of an earth electrode 14 and a bias electrode 15 to form an ion beam in a deposition chamber 5. Said beam is irradiated to the base body 7 on a sample base 6. A B-contg. gas such as B2H6 is ejected toward the body 7 from the 2nd introducing pipe 8 at the same instart to grow the BN in a vapor phase on the body 7. The laser 10 in a 7.5-12mum wavelength region is scanned from a laser light projecting source 9 on the body 7 via an introducing window 11 and a reflecting plate 12. The high-hardness BN film consisting essentially of CBN and WBN is thus formed on the base body 7. |
