INSPECTION DEVICE FOR INTEGRATED CIRCUIT DEVICE,申请号JP19910090065-传众专利搜索

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发明名称	INSPECTION DEVICE FOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号	JPH0526951(A)	申请公布日期	1993.02.05
申请号	JP19910090065	申请日期	1991.03.28
申请人	SOKEN INTERNATL:KK	发明人	KIMURA KIYOSHI;HARUTA YUICHI;MORI YASUHIRO;OHIRA AKIHIRO
分类号	G01R31/00;G01R31/26	主分类号	G01R31/00
代理机构		代理人
主权项
地址

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