WAFER HOLDER WITH SHUTTER

摘要

PURPOSE:To provide the title wafer holder having a function capable of rapidly isolating the surface of a wafer from or exposing the same in the atmosphere. CONSTITUTION:The title wafer holder is composed of a holder base having a specimen chamber 2 and a film structure 3 having no end part to cover the aperture part of the specimen chamber 2. In such a constitution, the film structure 3 to cover the aperture part of the specimen chamber 2 on the holder base 1 can be opened and closed by electrostatic power so that the surface of the wafer contained in the specimen chamber 2 may be exposed in or isolated from the atmosphere.