| 摘要 |
PURPOSE:To provide the waveguide type optical parts having small propagation losses. CONSTITUTION:A lower clad layer 2 consisting of quartz glass is formed on a substrate 1. An antistatic layer and a mask layer having desired patterns are formed in this order on the surface of a lower clad part 2 and are irradiated with an electron beam from above the mask layer to form core parts 6 of desired patterns within the lower clad layer 2. The mask layer and the antistatic layer are removed to expose the surface of the lower clad layer 2. Further, an upper clad part 7 having the refractive index lower than the refractive index of the core parts 6 is formed on the exposed surface of the lower clad part 2. The surface of the entire part and the core parts 6 are parted in this way and, therefore, the scattering losses based on the microruggedness on the surface are decreased and the waveguide type optical parts having the small propagation losses are produced inexpensively. |
