发明名称 INCOMBUSTIBLE PHOTOSENSITIVE RESIN
摘要 PURPOSE:To enable development with an alkali developer in the stage of pattern forming and to improve incombustibility and other various properties by using a specified brom-substd. monomer and antimony trioxide of specified particle size or smaller particle size. CONSTITUTION:This compsn. consists of the following components (a)-(e). (a) 35-65 pts.wt. of acryl thermoplastic polymer containing 15-30wt.% copolymer of at least one kind of alpha, beta unsatd. carboxyl group-contg. material, (b) 5-30 pts.wt. brom-substd. monomer expressed by formula I, (c) 0.1-10 pts.wt. antimony trioxide having <0.1mum average particle size, (d) 20-55 pts.wt. of vinyl monomer except for (b), and 0.01-10 pts.wt. of photopolymn. initiator, with the total amt. 100 pts.wt. In formula I, R1 is H or CH3, A is R2On, (R2 is an alkylene group of 2-3 carbon number and n is an integer 1-4) and at least two of X1-X3 are Br and others are H.
申请公布号 JPH0527433(A) 申请公布日期 1993.02.05
申请号 JP19910263770 申请日期 1991.10.11
申请人 MITSUBISHI RAYON CO LTD 发明人 KUSHI KENJI;INUKAI KENICHI
分类号 C08F2/50;G03F7/004;G03F7/027;G03F7/029;G03F7/031;G03F7/033;H01L21/027;H05K3/28 主分类号 C08F2/50
代理机构 代理人
主权项
地址