VERTICAL-TYPE CVD/DIFFUSION APPARATUS,申请号JP19910207429-传众专利搜索

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发明名称	VERTICAL-TYPE CVD/DIFFUSION APPARATUS
摘要
申请公布号	JPH0529434(A)	申请公布日期	1993.02.05
申请号	JP19910207429	申请日期	1991.07.23
申请人	KOKUSAI ELECTRIC CO LTD	发明人	ISHIZU HIDEO
分类号	H01L21/205;H01L21/22;H01L21/285;H01L21/31;H01L21/677;H01L21/68	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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