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经营范围
发明名称
PLASMA CVD DEVICE
摘要
申请公布号
JPH0529229(A)
申请公布日期
1993.02.05
申请号
JP19910087571
申请日期
1991.03.26
申请人
ULVAC JAPAN LTD
发明人
MIYAZAKI SEIICHI;HIROSE ZENKO;HAYASHI TOSHIO
分类号
H01L21/205;H01L21/302;H01L21/3065;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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