MANUFACTURE OF THIN FILM, AND VERTICAL FILM FORMING APPARATUS,申请号JP19910178549-传众专利搜索

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发明名称	MANUFACTURE OF THIN FILM, AND VERTICAL FILM FORMING APPARATUS
摘要
申请公布号	JPH0529305(A)	申请公布日期	1993.02.05
申请号	JP19910178549	申请日期	1991.07.19
申请人	FUJI ELECTRIC CO LTD	发明人	SAKAI TAKAO
分类号	C23C16/44;C23C16/458;H01L21/205;H01L21/285;H01L21/31	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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