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发明名称
CRYSTAL GROWTH METHOD AND DEVICE
摘要
申请公布号
JPH0529219(A)
申请公布日期
1993.02.05
申请号
JP19910178200
申请日期
1991.07.18
申请人
FUJITSU LTD
发明人
BABA YASUO
分类号
C23C14/50;C30B23/08;H01L21/203
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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