发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURE THEREOF
摘要 PURPOSE:To provide a semiconductor device in which the level difference between the block area of a memory cell array and its peripheral area is reduced without increasing the number of processes and which has a structure that can reduce the level difference by dividing the depths of contact holes between A wiring and a word line and the manufacturing method of the device. CONSTITUTION:In a peripheral area A, the dummy sections 8c and 8d of bit lines are simultaneously formed with bit lines 8a and 8b in the block area A of a memory cell array in the same layer and the dummy section 12a of a plate electrode is simultaneously formed with a plate electrode 12a in the block area B in the same layer. In the area A, in addition, a word line 4 is connected to the dummy sections 8c and 8d through a contact hole 7b and the dummy sections 8c and 8d of bit lines are connected to Al wiring 15 through another contact hole 16.
申请公布号 JPH0529563(A) 申请公布日期 1993.02.05
申请号 JP19910178080 申请日期 1991.07.18
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 MATSUMOTO SUSUMU;HASHIMOTO SHIN;YAMADA TOSHIRO;NAKADA YOSHIRO
分类号 H01L21/768;H01L21/8242;H01L23/522;H01L23/528;H01L27/10;H01L27/105;H01L27/108 主分类号 H01L21/768
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