发明名称 |
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURE THEREOF |
摘要 |
PURPOSE:To provide a semiconductor device in which the level difference between the block area of a memory cell array and its peripheral area is reduced without increasing the number of processes and which has a structure that can reduce the level difference by dividing the depths of contact holes between A wiring and a word line and the manufacturing method of the device. CONSTITUTION:In a peripheral area A, the dummy sections 8c and 8d of bit lines are simultaneously formed with bit lines 8a and 8b in the block area A of a memory cell array in the same layer and the dummy section 12a of a plate electrode is simultaneously formed with a plate electrode 12a in the block area B in the same layer. In the area A, in addition, a word line 4 is connected to the dummy sections 8c and 8d through a contact hole 7b and the dummy sections 8c and 8d of bit lines are connected to Al wiring 15 through another contact hole 16. |
申请公布号 |
JPH0529563(A) |
申请公布日期 |
1993.02.05 |
申请号 |
JP19910178080 |
申请日期 |
1991.07.18 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
MATSUMOTO SUSUMU;HASHIMOTO SHIN;YAMADA TOSHIRO;NAKADA YOSHIRO |
分类号 |
H01L21/768;H01L21/8242;H01L23/522;H01L23/528;H01L27/10;H01L27/105;H01L27/108 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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