发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE:To eliminate necessity of aligning a semiconductor chip, to simplify an operation, and to simultaneously hold an alignment accuracy in a method for connecting the chip by a conventional solder bump. CONSTITUTION:A second silicon substrate 1B having an opening 6 for engaging a semiconductor chip is adhered to a first silicon substrate 1A having a circuit pattern and a solder bump connecting part, the chip 5 is then engaged, heated and connected. Then, after a photoresist film 7 is formed only on the chip 5, the substrate 1B is removed.</p>
申请公布号 JPH0529387(A) 申请公布日期 1993.02.05
申请号 JP19910180654 申请日期 1991.07.22
申请人 NEC CORP 发明人 ASAKURA MAKOTO
分类号 H01L21/60 主分类号 H01L21/60
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