METHOD AND APPARATUS FOR BURN-IN,申请号JP19910179774-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR BURN-IN
摘要
申请公布号	JPH0529417(A)	申请公布日期	1993.02.05
申请号	JP19910179774	申请日期	1991.07.19
申请人	SUMITOMO ELECTRIC IND LTD	发明人	NISHIGUCHI KATSUNORI;HASHINAGA TATSUYA
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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