VERFAHREN ZUR VERSTAERKUNG EINES KOERPERS AUS SILIZIUM, MATERIALIEN DAFUER UND SEINE ANWENDUNG ZUR VERRINGERUNG DER DICKE EINES SILICIUMPLAETTCHENS.,申请号DE19863685858T-传众专利搜索

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发明名称	VERFAHREN ZUR VERSTAERKUNG EINES KOERPERS AUS SILIZIUM, MATERIALIEN DAFUER UND SEINE ANWENDUNG ZUR VERRINGERUNG DER DICKE EINES SILICIUMPLAETTCHENS.
摘要
申请公布号	DE3685858(T2)	申请公布日期	1993.02.04
申请号	DE19863685858T	申请日期	1986.05.28
申请人	TEKTRONIX INC., BEAVERTON, OREG., US	发明人	CORRIE, BRIAN LEE, GASTON OREGON 97119, US
分类号	H01L21/339;H01L21/302;H01L21/304;H01L27/14;H01L27/148;H01L29/76;H01L29/762;H01L29/772;H01L31/10;(IPC1-7):H01L21/302;H01L21/316	主分类号	H01L21/339
代理机构		代理人
主权项
地址

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