METHOD OF ADJUSTING BRIDGE CIRCUIT OF SEMICONDUCTOR PRESSURE SENSOR

摘要

A method of adjusting a bridge circuit of a semiconductor pressure sensor comprises the steps of providing conductive lines connected to at least one of diffused resistors at predetermined intervals during the wiring process, said diffused resistors being provided to connect strain gauge resistors constituting said bridge circuit; providing means for adjusting the resistance value of at least said one of said diffused resistors; making vacuum suction to the back surface of a diaphragm of said semiconductor pressure sensor in the testing process to make a state wherein pressure is virtually applied to said diaphragm from the surface side thereof; measuring the pressure sensitivity of said semiconductor pressure sensor from the surface side of the diaphragm by making use of said bridge circuit; and adjusting the resistance value of at least said one of said diffused resistors by said adjusting means based on the pressure sensitivity thus measured to adjust the balance of said bridge circuit.