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发明名称
SELECTIVE ELECTROCHEMICAL ETCHING
摘要
申请公布号
EP0504956(A3)
申请公布日期
1993.02.03
申请号
EP19920200433
申请日期
1992.02.17
申请人
GENERAL MOTORS CORPORATION;MASSACHUSETTS INSTITUTE OF TECHNOLOGY
发明人
WANG, SU-CHEE SIMON;SCHMIDT, MARTIN ARNOLD;MCNEIL, VINCENT MAURICE
分类号
H01L21/3063;(IPC1-7):H01L21/306
主分类号
H01L21/3063
代理机构
代理人
主权项
地址
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