| 摘要 |
PURPOSE:To continuously detect the line width of a line with an unknown shape formed on an object at a high speed in the line width continuous measuring method with a CCD camera and the like. CONSTITUTION:An observation point P is set in a band-like line to be measured in a readout image, scanning is made in even directions passing through the observation point to detect both edge points Pa0, Pa1,... of the band-like line, and the minimum value among the distances between both edge points of the band-like line on the scanning lines is selected as the line width at the observation point. The direction for setting the observation point P1 in the next measurement is determined from positions of the observation point in the previous measurement and the observation point P in the present measurement, the next observation point P1 is set at an interior division point between the edge points Pa0, Pd0 in the present measurement based on this direction and the position of the edge points Pa0, Pd0 in the present measurement, and the line width is automatically and continuously measured. |
