PRODUCTION OF RADIATION-SENSITIVE COMPONENT, AND POSITIVE RESIST COMPOSITION

摘要

PURPOSE:To provide a process for producing the subject component in a short time without causing deposition and to provide the subject compsn. having an improved resolution. CONSTITUTION:The objective component is produced by condensing a phenol compd. with a diazidoquinonesulfonic acid halide in a solvent mixture consisting of a solvent having a specific permittivity of 10 or lower and one having a specific permittivity of 15 or higher, and is used for producing the objective compsn.