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发明名称
摘要
申请公布号
JPH054195(Y2)
申请公布日期
1993.02.02
申请号
JP19850088630U
申请日期
1985.06.11
申请人
发明人
分类号
G01N1/28;G01N23/00;H01J37/20;(IPC1-7):H01J37/20
主分类号
G01N1/28
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代理人
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