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经营范围
发明名称
SCANNING TYPE TUNNEL MICROSCOPE
摘要
申请公布号
JPH0526612(A)
申请公布日期
1993.02.02
申请号
JP19910177967
申请日期
1991.07.18
申请人
HITACHI LTD
发明人
YAMAUCHI HIROSHI;SAKAI MASANORI
分类号
G01B7/34;G01N37/00;G01Q10/04;G01Q60/10;H01J37/28
主分类号
G01B7/34
代理机构
代理人
主权项
地址
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