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发明名称
VALVE MECHANISM FOR VACUUM CHAMBER
摘要
申请公布号
JPH0526369(A)
申请公布日期
1993.02.02
申请号
JP19910182122
申请日期
1991.07.23
申请人
SHIMADZU CORP
发明人
KAMESHIMA NORIO
分类号
F16K35/00;F16K51/02;G01N27/62
主分类号
F16K35/00
代理机构
代理人
主权项
地址
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