| 摘要 |
PURPOSE:To obtain a proper measurement image and enable a defect, etc., to be judged easily without being affected by a surface state of an article to be inspected by fixing a position of a gate to a focusing position which is set in a surface-wave synchronization mode. CONSTITUTION:A mode-setting program 14a is set to a surface wave synchronization mode, a time value corresponding to a distance from a surface of an article 1 to be inspected to a focusing position is calculated by a CPU 9, it is sent to a peak-detection/distance-measuring portion 7 as a set delay time tDS, and at the same time it is stored in a data storage region 14e. Then, measurement start is input by a keyboard 10, a main synchronization mode is set, and a fixed grate setting program 14c is started. The CPU 9 calculates a sum of the time-measuring value tT from a transmission wave to the surface wave and the delay time tDS and then sends it to the distance-measuring; portion 7 as the set delay time TDS, thus enabling a crate pulse to be fixed at a position where a focus was located and hence a peak value and a position of a defect wave to be taken properly for obtaining an accurate measurement image. |
