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发明名称
BEARING MECHANISM PERMITTING ECCENTRIC ROTATION AND ROTATIONAL DRIVING DEVICE CONSTITUTED BY USING THIS MECHANISM
摘要
申请公布号
JPH0525630(A)
申请公布日期
1993.02.02
申请号
JP19910203807
申请日期
1991.07.18
申请人
TEL VARIAN LTD
发明人
NAKADA TETSUO
分类号
C23C14/50;F16C23/06;H01J37/317;H01L21/265
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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