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发明名称
PLASMA TREATING DEVICE
摘要
申请公布号
JPH0525645(A)
申请公布日期
1993.02.02
申请号
JP19910029395
申请日期
1991.01.30
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
MATSUO SEITARO;KIUCHI MIKIHO;NISHIMURA HIROSHI
分类号
C23C16/50;C23C16/511;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;H05H1/46
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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