发明名称 NEGATIVE-WORKING RADIATION-SENSITIVE MIXTURE AND RADIATION-SENSITIVE RECORDING MATERIAL PRODUCED THEREWITH
摘要 A negative-working radiation-sensitive mixture containing a) a compound which contains at least one -CBr3 group bound to an atom not linked in turn to a hydrogen atom, b) an alkoxymethylated melamine and c) a water-insoluble polymeric binder which is soluble, or at least swellable, in aqueous alkaline solutions and contains phenolic OH groups, wherein (1) the mixture has an absorption of < 0.4 .mu.m-1 at 248 nm, (2) the CBr3 group of the compound a) is bound to the sulfur atom of a sulfonyl group and the compound a) is contained in the mixture in an amount of 0.2 to 10% by weight, based on the total amount of the components b) and c), (3) the ratio by mass of the components b) and c) is between 50 : 50 and 5 : 95 and (4) the component c) is a homopolymer or copolymer of hydroxystyrene or a derivative thereof, the homopolymer or copolymer having a removal rate of 200 to 3,000 nm/min at 21.degree.C in an aqueous alkaline developer containing 2.38% by weight of tetramethylammonium hydroxide, has excellent properties including high resistance to plasma etching, and outstanding lithographic properties and is useful in recording materials.
申请公布号 CA2074791(A1) 申请公布日期 1993.01.30
申请号 CA19922074791 申请日期 1992.07.28
申请人 HOECHST AKTIENGESELLSCHAFT 发明人 PAWLOWSKI, GEORG;DAMMEL, RALPH;ROESCHERT, HORST;MEIER, WINFRIED;SPIESS, WALTER;PRZYBILLA, KLAUS-JUERGEN
分类号 G03F7/00;C04B41/50;G03F7/029;G03F7/038;H01L21/027;(IPC1-7):G03F7/038 主分类号 G03F7/00
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