APPARTUS FOR WET CLEANING PROCESS,申请号KR19900012330U-传众专利搜索

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发明名称	APPARTUS FOR WET CLEANING PROCESS
摘要
申请公布号	KR930000401(Y1)	申请公布日期	1993.01.30
申请号	KR19900012330U	申请日期	1990.08.16
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	OH, YONG - SON;SONG, CHANG - RYONG
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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