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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0521377(A)
申请公布日期
1993.01.29
申请号
JP19910168464
申请日期
1991.07.09
申请人
TOSHIBA CORP
发明人
TAKEUCHI YUKIO
分类号
H01L21/28;H01L21/285;H01L21/768
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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