| 摘要 |
<p>PURPOSE:To provide a wafer holder capable of processing a wafer of small diameter in a manufacturing line whose diameter is larger than the wafer diameter. CONSTITUTION:A holder outer frame 1 and at least three sets of wafer retainers fixed to the inner periphery of the holder outer frame 1 are provided. The holder outer frame 1 has an outer periphery equal to the outer periphery of a wafer whose diameter is larger than the diameter of a wafer 4 to be retained, and an inner periphery capable of accommodating the wafer 4 to be retained. Each of the wafer retainers is constituted of a pawl 3 retaining the end portion of the wafer 4 to be retained and a wafer holder having a screw 2 connecting the pawl 3 with the holder outer frame 1. The holder outer frame 1 and the pawl 3 are made of quartz.</p> |
