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经营范围
发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号
JPH0521477(A)
申请公布日期
1993.01.29
申请号
JP19910168187
申请日期
1991.07.09
申请人
MITSUBISHI ELECTRIC CORP
发明人
HIRAGA MOTOAKI
分类号
H01L21/50
主分类号
H01L21/50
代理机构
代理人
主权项
地址
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