| 摘要 |
PURPOSE:To improve the reliability of a wire bonding device so as to form an optimum ball diameter by detecting the occurrence of a high frequency at the time of abnormal discharge and notifying the abnormal discharge based on the occurrence of the high frequency. CONSTITUTION:A high-frequency detection circuit 13 is constituted so that the circuit 13 can detect the occurrence of abnormal discharge by detecting a high frequency generated from a discharge electrode 10. Therefore, the occurrence of such an accident that a ball is buried in a capillary 9, and so on, can be prevented and, at the same time, a ball having a suitable ball diameter can be formed. In addition, since the occurrence of abnormal discharge can be notified quickly, the reliability of a wire bonding device can be improved. |
