METHOD AND DEVICE FOR FORMING INSULATING FILM

摘要

PURPOSE:To form the insulating film having high quality and excellent uniformity of film thickness at a low temp. and to eliminate the defect of the insulating film of a nonlinear resistance element for a liquid crystal display and further to obtain a display which does not require a temp. compensation circuit. CONSTITUTION:The constitution consisting in providing a grounding electrode 18 and an electrode 19 for impressing a high-frequency electric power within a vacuum vessel is provided to face each other. A substrate 20 for forming the insulating film is disposed on the electrode 19 for impressing the high-frequency electric power. Gas contg. oxygen or nitrogen is supplied between the electrodes facing each other and a high-frequency discharge is generated, by which the insulating film is formed on the surface of the substrate 20.