SEMICONDUCTOR MANUFACTURING EQUIPMENT AND MANUFACTURE OF SEMICONDUCTOR

摘要

PURPOSE:To realize manhour reduction and automating in the process from dicing to expanding, and improve productivity and quality. CONSTITUTION:Each I/O port of each of the units 2, 4, 6 performing dicing process, breaking process and expanding process is subjected to line connection. The application of cassettes for wafer delivery is prevented, and the processes are made a series of automated processes, thereby improving productivity.