| 摘要 |
PURPOSE:To provide a small-size laser oscillator whose average output and pulse output are both stable and which has excellent characteristics by efficiently and continuously injecting a halogen gas, relating to a gas supply, circulation and replenishing system of a rare gas halide excimer laser oscillator which includes an excited gas purifying device (circulator). CONSTITUTION:The first circulation path which connects a laser container 1 with a gas purifying device (circulator) and the second circulation path which connects a discharging side with a sucking side of the gas purifying device 2 are provided, and on the way of the second circulation path, a gas holder 21, a flow control means and valves 16, 17 and 18 are provided. In the gas holder 21, a halogen concentration detector 20, a pressure detector 10 and a laser gas injecting valve are provided, and a portion of a laser gas flowing in the first circulation path is, by way of the flow control means, permitted to flow into the second circulation path, and then it is allowed to flow back into the first circulation path by flow control so that the laser gas replenished to the laser container 1 is constant in flow rate. An average laser output and a pulse output become stable, resulting in increased reliability. |
