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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0521456(A)
申请公布日期
1993.01.29
申请号
JP19910172350
申请日期
1991.07.12
申请人
MITSUBISHI ELECTRIC CORP
发明人
YAMAGUCHI TAKEHISA
分类号
H01L21/302;H01L21/322;H01L21/336;H01L29/78
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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