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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH0521739(A)
申请公布日期
1993.01.29
申请号
JP19910170802
申请日期
1991.07.11
申请人
NEC CORP
发明人
SANADA KATSU
分类号
H01L21/66;G01R31/311;H01L21/8238;H01L27/092
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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