| 摘要 |
PURPOSE:To minimize the influence of optical distortion to the title device by controlling the position of a work so that the reference position of the work can be brought nearer to the optical axis of an optical image pickup means by relatively moving the image pickup means or work after conducting coordinate detection for roughly positioning the reference position of the work. CONSTITUTION:By moving an X-Y table 7, the images of electrode pads E0, E1,... sections are taken with a TV camera 11 and the picture data 34 of the sections are fetched. Then a pattern matching process is executed. When a pattern matches, the position of the pad E0 is roughly detected by calculating the coordinates of the pad E0 with respect to a reference electrode pad P0. Then the coordinates of the rough position of the pad E0 and shifted amount DELTAX1 and DELTAY1 of the optical axis of the camera 11 against coordinates '0' are calculated and, when the shifted amount exceeds an allowable limit, the table 7 is moved by the shifted amount DELTAX1 and DELTAY1. When the shifted amount is within the allowable limit, precise position detection is executed for detecting the position of the electrode pad E0 and the detected position is stored. |
