VACUUM PROCESS EQUIPMENT,申请号JP19910174867-传众专利搜索

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发明名称	VACUUM PROCESS EQUIPMENT
摘要
申请公布号	JPH0521579(A)	申请公布日期	1993.01.29
申请号	JP19910174867	申请日期	1991.07.16
申请人	FUJITSU LTD	发明人	SUZUKI MASAFUMI
分类号	H01L21/203;H01L21/677;H01L21/68	主分类号	H01L21/203
代理机构		代理人
主权项
地址

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