SILICON-ON-SILICON DIFFERENTIAL INPUT SENSORS

摘要

An improved diaphragm sensor employs silicon-on-silicon technology and has monolithic integrated signal conditioning circuitry. The support circuitry minimizes the effects of stray capacitance and may be configured to provide either analog or digital output to external terminals. It has a wide band of linearity and is particularly useful for accurately measuring pressures less than 0.5 PSI. The sensor is constructed by joining a silicon top plate (10) having a mechanical pressure stop, a reduced thickness silicon diaphragm (16) and a back plate (26) having CMOS circuitry thereon. These components are bonded together by eutectic soldering.